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9781107413214

Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605

Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605
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Product details

  • ISBN-13: 9781107413214
  • ISBN: 1107413214
  • Publication Date: 2014
  • Publisher: Cambridge University Press

AUTHOR

de Boer, Maarten P., Heuer, Arthur H., Jacobs, S. Joshua

SUMMARY

de Boer, Maarten P. is the author of 'Materials Science of Microelectromechanical Systems (MEMS) Devices II: Volume 605', published 2014 under ISBN 9781107413214 and ISBN 1107413214.

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